← all shorts

Institution

EUV LLC

A modern white building with large windows and the letters "EUC" prominently displayed on its facade stands under a bright blue sky with scattered clouds.

A private consortium organised in 1997 by Intel, Motorola, and AMD, with the US Department of Energy national laboratories as research partners. With a budget of roughly 250 million dollars over five years, the EUV LLC funded the foundational work on multilayer mirrors, plasma light sources, and resist chemistry that ASML and Zeiss eventually turned into a commercial product.

Mentioned in 1 article